资 源 简 介
Applications of microelectromechanical systems (MEMS) and microfabrica-
tion have spread to different fields of engineering and science in recent years.
Perhaps the most exciting development in the application of MEMS technol-
ogy has occurred in the biological and biomedical areas. In addition to key
fluidic components, such as microvalves, pumps, and all kinds of novel
sensors that can be used for biological and biomedical analysis and mea-
surements, many other types of so-called micro total analysis systems (TAS)
have been developed.
