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Foundations of MEMS

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Five years have passed since the first edition of this book was published.Over the five years,the world has witnessed a technological revolution headlined by an array of exciting consumer and industrial products such as the Nintendo Wii, Apple iPod/iPad, sensor-rich smart phones, phones with cameras,new operating systems for mobile phones and apps,e-books,WiFi,voice- over-IP calls, social networking, 3D animated movies, and cloud computing, to name the major ones that affect everyday living

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