资 源 简 介
For more than three decades, Micro Electro Mechanical Systems (MEMS) have
steadily transitioned out of research labs and into production forming a more than $10 billion
market [1]. MEMS devices such as accelerometers, pressure sensors and microphones, to name
a few, have seen immense utilization, particularly in the consumer electronics market, because
of their compact sizes and minute power consumptions. In addition, these devices benefit from
batch fabrication, which has enabled year-over-year reductions in cost [2]. In recent years,
