资 源 简 介
Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed
ofintegratedelectricalandmechanicalpartstosenseand/orcontrolthingsonaµmscale.
The concept of MEMS is attributed to Richard Feynman’s famous talk on December
29th, 1959 [2,3]. Dr. Feynman foresaw many aspects of future MEMS development
with his insight in microphysics. In particular, material properties in the µm scale are
differentfrombulkpropertiesandthescalingdownofintegratedcircuits(IC)fabrication
technology has been a major driving force of MEMS development.
