资 源 简 介
Over many years, RF-MEMS have been a hot topic in research at the technology
and device level. In particular, various kinds of mechanical Si-MEMS resonators
and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The
BAW technology has made its way to commercial products for passive RF filters,
in particular for duplexers in RF transceiver front ends for cellular communica-
tions. Beyond their use in filters, micromachined resonators can also be used in
conjunction with active devices in innovative circuits and architectures.
